INSPECTION DEVICE FOR FLAW OF PATTERN

摘要

PROBLEM TO BE SOLVED: To provide an inspection device for the flaw of a pattern, capable of detecting the printing shift caused by the expansion and contraction of a screen original plate. SOLUTION: A glass substrate B to be inspected is photographed by a reference camera 1 and a comparing camera 2 both of which are set at a reference interval L and the printing shift caused by the expansion and contraction of the screen original plate is detected from a correlation between the image due to the reference camera 1 and the image due to the comparing camera 2. COPYRIGHT: (C)2004,JPO&NCIPI