| 摘要 |
PROBLEM TO BE SOLVED: To judge the quality of a substrate corresponding to the degree of a change in the stripe-like density formed in the colored film on the substrate by grasping the change in the stripe-like density with an extremely good sensitivity and to also inspect the irregularity of the stripe-like density in two directions. SOLUTION: This inspection device for inspecting the substrate is constituted as follows. The colored film on the substrate is photographed and the density of all of the pixels belonging to the same X-coordinates of the obtained image are added to form unidimensional projection data in an X-direction. Further, the density values of all of the pixels belonging to the same Y-coordinates of the image are added to form unidimensional projection data in a Y-direction. Then, these projection data are compared with reference projection data. COPYRIGHT: (C)2004,JPO&NCIPI
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