| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a method for manufacturing an organic EL display panel which has a simple structure, high reliability and a high mechanical strength, and employs a metal mask for forming high performance organic EL elements, and to provide a high-definition and high-quality organic EL display panel manufactured by the method. <P>SOLUTION: At least one of an organic light emitting layer, an electron injection layer and an electron transport layer is formed by vapor deposition of vapor deposition material through mask holes of a multilayer metal mask, wherein these layers constitute picture elements of the organic EL panel. The multilayer metal mask 100 comprises a first metal layer 26 composed of a material facing a transparent board constituting the organic EL, and a second metal layer 21 composed of a material different from the material facing the supply source of the vapor deposition material. The second metal layer 21 is composed of a thick magnetic plate, and the area of first mask holes 24A of the first metal layer 26 is equal to or smaller than the area of second mask holes 55 of the second metal layer 21. <P>COPYRIGHT: (C)2004,JPO&NCIPI |
