| 摘要 |
PROBLEM TO BE SOLVED: To provide an electrostatic attracting method for increasing the electrostatic force for attracting and holding a substrate. SOLUTION: The electrostatic attracting method for attracting and holding a substrate on the holding surface of a table by an electrostatic force generated by applying a direct current to electrodes provided on the table made of dielectrics includes: a first step for applying a voltage, which has a predetermined polarity, to the electrodes to give electrical charges on the holding surface with a polarity opposite to that of the electrodes; a second step for contacting a substrate with the holding surface to prevent the dissipation of the electrical charges borne on the holding surface; a third step for applying a voltage, which has an opposite polarity to that of the voltage applied in the first step, to the electrodes with the substrate being contact with the holding surface to occur electric charges, which has the same polarity as that of the electric charges borne on the holding surface in the first step, on the holding surface of the table, thereby attracting and holding the substrate using this electric charges and the electric charges borne on the holding surface in the first step. COPYRIGHT: (C)2004,JPO&NCIPI |
