| 摘要 |
PROBLEM TO BE SOLVED: To provide a mirror drive unit which allow a mirror to shift on a large scale while the breakage is prevented even when the beam is largely bent. SOLUTION: The mirror drive unit is provided with a substrate, a mirror plate on the main face of which a mirror film is formed, and an actuator having a beam part which is fixed on the substrate at an end part and is connected to the other main face of the mirror plate at the other end part via a connection part, and the other end part of the beam part is vertically movable, and the beam part includes a silicone nitride film. COPYRIGHT: (C)2004,JPO&NCIPI
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