发明名称 Data path for high performance pattern generator
摘要 A method and system for a high-speed datapath for a high-performance pattern generator such as an analog SLM for generating the image is disclosed. The data path has provisions for completely independent parallel data flows giving true scalability to arbitrarily high throughput. In an exemplary embodiment areas on the SLM are assigned to specific rasterizing and fracturing processors. There is an overlap between fields for blending of the edges in the pattern and for computation of interaction between features in the pattern. The datapath has data integrity checks and a recovery mode when an error condition is raised, allowing it to recover from most errors without creating new errors.
申请公布号 US2004159636(A1) 申请公布日期 2004.08.19
申请号 US20040782863 申请日期 2004.02.23
申请人 SANDSTROM TORBJORN;THUREN ANDERS 发明人 SANDSTROM TORBJORN;THUREN ANDERS
分类号 G03F1/08;G03F7/20;H01L21/027;(IPC1-7):B23K26/00 主分类号 G03F1/08
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