TRANSPORT SYSTEM HAVING SHARED LOAD-LOCK FRONT-END ASSEMBLY
摘要
The present invention provides an improved transport system for transfer of media. More specifically, the present invention provides a transport system having shared load-lock front-end assembly or subsystem suitable for transferring media, particularly semiconductor wafers, in a controlled environment such as a vacuum or low oxygen environment.
申请公布号
WO2004069698(A2)
申请公布日期
2004.08.19
申请号
WO2004US02859
申请日期
2004.02.02
申请人
AVIZA TECHNOLOGY INC.;KIELCZEWSKI, GREGORY;WOLFF, THOMAS Q.;CHEREPAKHO, JACOB
发明人
KIELCZEWSKI, GREGORY;WOLFF, THOMAS Q.;CHEREPAKHO, JACOB