| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide an electron probe microanalyzer capable of restraining the influence of external disturbance by heightening the rigidity of a whole body thereof. <P>SOLUTION: The electron probe microanalyzer is composed of a sample chamber outside wall 17 jointed to the lower part of a lens barrel 2 in which, a charged particle beam passage is formed, and with a sample chamber formed inside supporting a sample on which a charged particle beam B is irradiated; a base plate 19 supporting the lower end of the sample chamber outside wall 17; a spectrometer communication hole formed in the sample chamber outside wall 17; a spectrometer outside wall 31 of which the inside is communicated with the sample chamber through the spectrometer communication hole, supporting a spectrometer separating and detecting the X-ray generated from the surface of the sample irradiated by the charged particle beam; and a spectrometer outside surface supporting member 34 fixed to and supported by the base plate 19, fixing and supporting the lower end of the spectrometer outside wall 31. <P>COPYRIGHT: (C)2004,JPO&NCIPI</p> |
