MOLD CLEANING METHOD AND DEVICE

摘要

PROBLEM TO BE SOLVED: To efficiently remove a residue adhering to a mold without damaging the mold. SOLUTION: The mold 13 with the residue 14 adhering thereon is prepared. By making pulse laser beam, which has a property to penetrate the residue and reflect at an interface between the residue and the mold and consequently separate the residue at the reflected position from the mold, incident from the surface of the residue onto the mold, some part of the residue at the incident position is separated from the mold. COPYRIGHT: (C)2004,JPO&NCIPI