| 摘要 |
PROBLEM TO BE SOLVED: To provide a two-dimensional array type dielectric barrier discharge device capable of enhancing emission efficiency and emission intensity. SOLUTION: Discharge gas is filled in a discharging container 1 to form excimer molecules by dielectric barrier discharge. A discharge unit of three-layer structure is constructed by interposing a dielectric layer 5 between an internal electrode 3 on which a number of openings for discharge 4 directly contacting with the discharge gas are arranged, and an opposing electrode 6. The internal electrode 3 is covered by an insulation film 8 like an MgO film. Or, the insulation film 8 like the MgO film is formed between the dielectric layer 5 and the internal electrode 3. Supply of secondary electron is promoted by the insulation film 8 to improve the emission efficiency. Further, abrasion of the internal electrode 3 can be prevented by the insulation film 8. COPYRIGHT: (C)2004,JPO&NCIPI
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