METHOD OF MANUFACTURING IMPRINT, APPARATUS FOR MANUFACTURING THE SAME, METHOD OF MANUFACTURING MAGNETIC RECORDING MEDIUM, AND APPARATUS FOR MANUFACTURING THE SAME

摘要

PROBLEM TO BE SOLVED: To provide an imprinting method and an apparatus therefor which can prolong the lifetime of a mold and/or can perform processing on an article to be processed of high quality. SOLUTION: The imprinting method and apparatus therefor are characterised by having a step of softening a resist of the processed product by using gas under pressure and a supercritical fluid, the processed product being composed of a substrate where the resist is applied, and a step of pressing a mold, on which a predetermined pattern is formed to the resist of the processed product, to transfer the predetermined pattern to the resist. COPYRIGHT: (C)2004,JPO&NCIPI