| 摘要 |
PROBLEM TO BE SOLVED: To provide a conveyance device capable of transferring a base among a plurality of stages in a short time. SOLUTION: This conveyance device 1 for the base 100 is provided with the plurality of stages 2A to 2E provided with many hole parts 6c, 6c on an upper face 2a, a gas supply device 3 for feeding gas into the hole parts 6c, 6c, and a holding device 4 capable of holding the base 100 while opposing to the upper face 2a of the plurality of stages 2A to 2E and moving among the plurality of stages 2A to 2E along the direction of arrangement of the plurality of stages 2A to 2E. COPYRIGHT: (C)2004,JPO&NCIPI
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