| 发明名称 |
METHOD OF ELIMINATING RESIDUAL CARBON FROM FLOWABLE OXIDE FILL |
| 摘要 |
Methods of forming an oxide layer such as high aspect ratio trench isolations, and treating the oxide substrate to remove carbon, structures formed by the method, and devices and systems incorporating the oxide material are provided. |
| 申请公布号 |
WO2004070817(A2) |
申请公布日期 |
2004.08.19 |
| 申请号 |
WO2004US03236 |
申请日期 |
2004.02.04 |
| 申请人 |
MICRON TECHNOLOGY, INC.;LI, LI;LI, WEIMIN |
发明人 |
LI, LI;LI, WEIMIN |
| 分类号 |
C23C16/04;C23C16/40;C23C16/56;H01L21/316;H01L21/762 |
主分类号 |
C23C16/04 |
| 代理机构 |
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代理人 |
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| 主权项 |
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| 地址 |
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