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发明名称
Precise substrate-to substrate alignment using self alignment structures
摘要
申请公布号
SE0402042(D0)
申请公布日期
2004.08.18
申请号
SE20040002042
申请日期
2004.08.18
申请人
FRANK NIKLAUS;GOERAN STEMME
发明人
FRANK NIKLAUS;GOERAN STEMME
分类号
H01L;(IPC1-7):H01L/
主分类号
H01L
代理机构
代理人
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