| 摘要 |
The aim of the invention is to provide a method allowing generation of periodic curved structures in a basic support material such as the basic layer for the magnetic bit cells of a magnetic storage device. <??>This aim is achieved according to the invention by a method for generating a periodic circular structure for a support (12) for a magnetic storage device, comprising: a) generating a number of masks with each mask having at least two transmission diffraction gratings (4, 6, 8, 20 to 34) each having a different periodic concentric circular and/or spiral-like periodic pattern; b) positioning of one or more of said diffraction masks (4, 6, 8, 20 to 34) successively in a certain distance of a basic support material (12) to be patterned; c) applying light beams through each of the diffraction masks (4, 6, 8, 20 to 34) for exposuring the basic support material to said light beam; d) interfering the different light beams diffracted by the gratings on each mask in order to generate coincident light intensity pattern on the surface of the basic support material (12) e) repeating the exposure procedure a number of times with different masks to obtain a desired pattern of a periodic circular structure with possible partitioning in the circumferential direction. <IMAGE>
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