,申请号JP20000008247-传众专利搜索

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发明名称
摘要
申请公布号	JP3554966(B2)	申请公布日期	2004.08.18
申请号	JP20000008247	申请日期	2000.01.17
申请人		发明人
分类号	H01L21/3205;C23F1/02;H01L21/288;H01L21/768;H05K3/04;H05K3/10;H05K3/24;H05K3/38;(IPC1-7):H01L21/320	主分类号	H01L21/3205
代理机构		代理人
主权项
地址

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