| 摘要 |
A high resolution and high data rate spot grid array printer system is provided, wherein an image is formed by scanning spot-grid array of optical beams across a substrate layered with a resist. High resolution is achieved by apodizing the optical beams to provide a narrower main lobe. Unwanted recordation of side lobes upon the substrate is prevented by assuring that the side lobes do not include energy above the threshold of the resist, using a memoryless resist, and by using a slanted and interleaved scan pattern adapted for use with the spot-grid array pattern and the memoryless characteristic of the resist. |
