Linear motor, stage apparatus, exposure apparatus and device manufacturing method

摘要

Disclosed is a linear motor that assures high-precision control. In a linear motor having magnets and coils which are moved relative to each other on the basis of Lorentz's force produced therebetween, there is a plurality of magnets disposed along a central axis of the coil, so that magnetization directions of these magnets have different tilts with respect to the central axis.