发明名称 |
Power supply apparatus for generating plasma |
摘要 |
A power supply apparatus for generating a plasma for supplying a high-frequency power to a plasma generating device which is a load. The power supply apparatus comprises: a DC power supply; a power conversion circuit which comprises an amplifier circuit of D-class comprising a plurality of switching elements, and which converts a DC power output of the DC power supply to a high-frequency power to output; and a load impedance conversion circuit which converts a load impedance to a predetermined delayed load, wherein the power supply apparatus is adapted to supply the high-frequency power output from the power conversion circuit to a plasma generating device through the load impedance conversion circuit.
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申请公布号 |
US6777881(B2) |
申请公布日期 |
2004.08.17 |
申请号 |
US20020292580 |
申请日期 |
2002.11.13 |
申请人 |
KYOSAN ELECTRIC MFG. CO., LTD. |
发明人 |
YUZURIHARA ITSUO;KIKUCHI MASAHIRO;SUENAGA TOYOAKI;ISHIKAWA YOICHI |
分类号 |
H05H1/46;H01J7/24;H01J37/32;H02M7/537;H02M7/5387;H03J3/20;(IPC1-7):H01J7/24 |
主分类号 |
H05H1/46 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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