| 摘要 |
A coordinate measuring stage includes a stationary base part having a linear X guidance element, a center part slidable along the linear X guidance element, and an X-Y-positionable stage body for reception of a substrate, the X-Y positionable stage body being movable slidingly alone the Y guidance element. The center part is arranged in freely suspended fashion over the base part and supported at one end on the Y guidance element and with at another end on another support element. The Y guidance element, the other support element, and the stake body are supported, slidably and independently of one another, on the surface of the base part.
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