发明名称 Cutting machine
摘要 A cutting machine comprising a chuck table for holding a workpiece, a spindle unit having a rotary spindle for mounting a cutting blade which cuts the workpiece held on the chuck table, and a spindle unit support mechanism for supporting the spindle unit in such a manner that it can move in a cutting direction, wherein the spindle unit support mechanism comprises a movable base, a guide rail which is provided on the movable base and has a predetermined curvature radius, a spindle unit support member which is movably disposed along the guide rail and mounts the spindle unit, and an angle adjustment mechanism for moving the spindle unit support member along the guide rail to adjust the angle.
申请公布号 US6776078(B2) 申请公布日期 2004.08.17
申请号 US20020263794 申请日期 2002.10.04
申请人 DISCO CORPORATION 发明人 GAWAZAWA TAKAYUKI
分类号 H01L21/304;B28D5/02;(IPC1-7):B26D5/20 主分类号 H01L21/304
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