STRUCTURE OF DIELECTRIC LAYER, PIEZOELECTRIC ACTUATOR USING STRUCTURE OF DIELECTRIC LAYER, AND INKJET HEAD TO MINIATURIZE AND HIGHLY INTEGRATE ELEMENT LIKE ACTUATOR, MEMORY OR SENSOR

摘要

PURPOSE: A structure of a dielectric layer is provided to miniaturize and highly integrate an element like an actuator, a memory or a sensor by obtaining a good dielectric characteristic, a piezoelectric characteristic, a superconductive characteristic and a ferroelectric characteristic. CONSTITUTION: A structure of a dielectric layer includes a substrate(102) and a dielectric layer(106) formed on the substrate. The dielectric layer has a plane orientation of (001) with respect to the substrate. The value u of the following formula 1 associated with the dielectric layer is a real number larger than 2. £formula 1| u=(Cc/Ca)*(Wa/Wc) Cc is a peak count number of a plane of (001') of the dielectric layer in out-of-plane X-ray diffraction measurement(wherein 1' is a selected natural number so that Cc becomes a maximum). Ca is a peak count number of a plane of (h'00) of the dielectric layer in in-plane X-ray diffraction measurement(wherein h' is a selected natural number so that Cc becomes a maximum). Wc is a width of a half of a peak value of the plane (001') in out-of-plane rocking curve X-ray diffraction measurement. Wa is a width of a half of a peak value of the plane (h'00) in in-plane rocking curve X-ray diffraction measurement.