| 摘要 |
PURPOSE: An apparatus for fixing a chamber for semiconductor manufacturing process using a magnetic field is provided to fix the cover and the body of the reaction chamber by applying a predetermined voltage to a gap between the cover and the body. CONSTITUTION: A shielding plate(90) is installed in one side of the chamber and between the body(60) and the cover(70) of the reaction chamber. A power supplying unit(80) applies a predetermined voltage to the body and cover of the reaction chamber, generating a magnetic field between the body and the cover by using the applied voltage and installed in the other side of the chamber.
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