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发明名称
VERFAHREN UND VORRICHTUNG ZUR HERSTELLUNG VON SUBSTRATEN MIT DÜNNEN FILMEN
摘要
申请公布号
AT273403(T)
申请公布日期
2004.08.15
申请号
AT19970908528T
申请日期
1997.03.27
申请人
TORAY INDUSTRIES, INC.
发明人
NOMURA, FUMIYASU
分类号
C23C14/54;C23C14/56;G02B1/11;(IPC1-7):C23C14/56
主分类号
C23C14/54
代理机构
代理人
主权项
地址
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