| 发明名称 |
VERFAHREN ZUR HERSTELLUNG MIKROMECHANISCHER STRUKTUREN |
| 摘要 |
A micromechanical structure is described which is disposed on a base body and requires protection from environmental influences by a covering body. Furthermore, electrical contacts are necessary for establishing contacts for the micromechanical structure. By skillfully carrying out a sawing-into operation and a sawing-through operation, it is possible to expose the electrical contact. |
| 申请公布号 |
AT272845(T) |
申请公布日期 |
2004.08.15 |
| 申请号 |
AT20000993537T |
申请日期 |
2000.12.13 |
| 申请人 |
INFINEON TECHNOLOGIES AG |
发明人 |
AIGNER, ROBERT;MICHAELIS, SVEN;BRAUER, MICHAEL;PLOETZ, FLORIAN |
| 分类号 |
G01P15/08;B81B3/00;B81B7/00;B81C1/00;G01P1/02;H01L21/301;H01L29/84 |
主分类号 |
G01P15/08 |
| 代理机构 |
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代理人 |
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| 主权项 |
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| 地址 |
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