DISPOSITIF DE PRODUCTION D'UNE NAPPE DE PLASMA,申请号FR20020006837-传众专利搜索

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发明名称	DISPOSITIF DE PRODUCTION D'UNE NAPPE DE PLASMA
摘要
申请公布号	FR2840451(B1)	申请公布日期	2004.08.13
申请号	FR20020006837	申请日期	2002.06.04
申请人	CENTRE NATIONAL DE LA RECHERCHE SCIENTIFIQUE CNRS	发明人	LAGARDE THIERRY LEON;LACOSTE ANA;PELLETIER JACQUES;ARNAL YVES ALBAN MARIE
分类号	C23C16/511;H01J27/16;H01J37/08;H01J37/32;H05H1/46;(IPC1-7):H01J1/46	主分类号	C23C16/511
代理机构		代理人
主权项
地址

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