发明名称 METHODS OF USING THIN METAL LAYERS TO MAKE CARBON NANOTUBE FILMS, LAYERS, FABRICS, RIBBONS, ELEMENTS AND ARTICLES
摘要 Methods of using thin metal layers to make Carbon Nanotube Films, Layers, Fabrics, Ribbons, Elements and Articles are disclosed. Carbon nanotube growth catalyst is applied on to a surface of a substrate, including one or more thin layers of metal. The substrate is subjected to a chemical vapor deposition of a carbon-containing gas to grow a non-woven fabric of carbon nanotubes. Portions of the non-woven fabric are selectively removed according to a defined pattern to create the article. A non-woven fabric of carbon nanotubes may be made by applying carbon nanotube growth catalyst on to a surface of a wafer substrate to create a dispersed monolayer of catalyst. The substrate is subjected to a chemical vapor deposition of a carbon-containing gas to grow a non-woven fabric of carbon nanotubes in contact and covering the surface of the wafer and in which the fabric is substantially uniform density.
申请公布号 AU2003205098(A1) 申请公布日期 2004.08.13
申请号 AU20030205098 申请日期 2003.01.13
申请人 NANTERO, INC. 发明人 THOMAS RUECKES;BRENT, M. SEGAL;JONATHAN, W. WARD
分类号 C01B31/02;C23C16/02;C23C16/26;C23C16/56;D01F9/127;(IPC1-7):C23C14/04;C23C16/04 主分类号 C01B31/02
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