| 摘要 |
PROBLEM TO BE SOLVED: To maintain the generation of negative particles for a long period of time in a photoelectron emission plate and a negative particle generating device using the same. SOLUTION: The photoelectron emission plate 1 is constructed by providing a barrier film having barrier performance on a substrate and by providing on the barrier membrane an emitting film for emitting photoelectrons by photo-irradiation. Thereby, the barrier film prevents that an underlying material having diffused the film emitting photoelectrons by photo-irradiation covers the film surface, and therefore, the photoelectron emission plate 1 in which the number of negative ions is not greatly reduced due to a negative particle generating time, that is, which has excellent durability for a long period of time is obtained, and the negative particle generating device using this is also obtained. COPYRIGHT: (C)2004,JPO&NCIPI
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