| 摘要 |
PROBLEM TO BE SOLVED: To widen a scanning range by adopting a mechanism for providing a driving part piezoelectric element for a sample or a Hall probe element in an ambient temperature portion to evade performance deterioration of the piezoelectric element under low temperature, and for providing only the Hall probe element of a sensor part and the sample in a low temperature portion. SOLUTION: This scanning Hall probe microscope is provided with a chamber 2, a cooling means 14 for cooling an inside of the chamber, a support member 3 for supporting the sample or the Hall probe element in a prescribed positional relation inside the chamber, a sample or Hall probe element mounting block 6 provided to be opposed to a tip of the support member, and actuators 9-11 for moving the support member horizontally or vertically in an ambient temperature area outside the chamber. COPYRIGHT: (C)2004,JPO&NCIPI
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