发明名称 |
METHOD AND APPARATUS FOR STABILIZING OF THE GLOW PLASMA DISCHARGES |
摘要 |
A method and apparatus for stabilizing glow plasma discharges by suppressing the transition from glow-to-arc includes a perforated dielectric plate having an upper surface and a lower surface and a plurality of holes extending therethrough. The perforated dielectric plate is positioned over the cathode. Each of the holes acts as a separate active current limiting micro-channel that prevents the overall current density from increasing above the threshold for the glow-to-arc transition. This allows for a stable glow discharge to be maintained for a wide range of operating pressures (up to atmospheric pressures) and in a wide range of electric fields include DC and RF fields of varying strength. |
申请公布号 |
WO2004044941(A3) |
申请公布日期 |
2004.08.12 |
申请号 |
WO2003US35097 |
申请日期 |
2003.11.05 |
申请人 |
THE TRUSTEES OF THE STEVENS INSTITUTE OF TECHNOLOGY |
发明人 |
KUNHARDT, ERICH;BECKER, KURT |
分类号 |
H01J;H01J7/24;H01J17/00;H01J17/04;H01J37/32;H01J61/28;H05H1/24;H05H1/46 |
主分类号 |
H01J |
代理机构 |
|
代理人 |
|
主权项 |
|
地址 |
|