| 摘要 |
PROBLEM TO BE SOLVED: To provide stage equipment which has a simple structure and can guide and drive a stage on a platen in X and Y directions, in a noncontact manner, without using electromagnetic force. SOLUTION: A stage member 22 of the stage equipment 10 is shaped into a box, having an inward-directed inner recess 22b. An opening end face 22a facing the platen 21 is provided around the recess 22b. A gas blowing port and a air sucking port are made in the opening end face 22a of the stage member 22. When the balance between the quantity of gas blew from the gas blow port and the quantity of gas sucked from the gas suction port is achieved, the stage member 22 can be moved in the X and Y axis directions, while being supported on the upper surface of the platen 21 in a noncontact manner. COPYRIGHT: (C)2004,JPO&NCIPI |
