| 摘要 |
PROBLEM TO BE SOLVED: To prevent hindrance of the luminous flux of exposure light by a space, containing the guide surface of a reticle stage. SOLUTION: In a movable stage device having reticle stages 3 and 7, on which a reflection-type reticle R is loaded, the guide surface 2 for moving the reticle stages is arranged in a space on a side opposite to the space, in which the luminous flux of exposure light reflected by the reticle is passed, when the space is divided by a plane containing the reflecting surface of the reticle. COPYRIGHT: (C)2004,JPO&NCIPI |
