| 摘要 |
PROBLEM TO BE SOLVED: To provide a power source which rapidly and surely stops arc discharge, prevents impression of excessive electric power at the time of electric power resupply and can rapidly deal with a short-circuit to ground, a sputtering power source and a sputtering system. SOLUTION: The power source can be made to execute rapid and sure shielding action by providing the power source with a plurality of arc detecting sensors and signal transmission circuits. Also, the problem due to supply of the excessive electric power can be prevented after the shielding action by providing the power source with inductor current sensors. Also, abnormalities. such as the "short-circuit to ground", can be rapidly detected and the power source can be stopped by comparing the measured values of the current sensors. In addition, the problem that a target current value overshoots is eliminated before the load shifts to a stationary state. Further, the excess current can be prevented even in the case of occurrence of the degradation in impedance, such as arc discharge. COPYRIGHT: (C)2004,JPO&NCIPI
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