发明名称 Oberflächenakustikwellenvorrichtung
摘要 Disclosed is a method of manufacturing a surface acoustic wave device comprising the steps of forming a drive electrode having a surface acoustic wave element function on a piezoelectric substrate wafer, providing a resist coat on an upper region of the drive electrode, covering the resist coat with a metal film, removing the resist coat lying within the metal film so that the metal film is formed in a dome form having a hollow portion covering the drive electrode, and providing a resin seal on the metal film.
申请公布号 DE10146655(B4) 申请公布日期 2004.08.12
申请号 DE2001146655 申请日期 2001.09.21
申请人 FUJITSU MEDIA DEVICES LTD., SUZAKA 发明人 SUGA, AKIRA
分类号 H03H9/25;H03H3/08;H03H9/02;H03H9/64 主分类号 H03H9/25
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