Chemical filter medium employed in clean room for removing chemical contaminants e.g. ozone and nitrogen oxide comprises two ozone absorption layers and a nitrogen oxide absorption layer containing filtering base neutral material

摘要

Providing a chemical filter medium that simultaneously removes ozone and nitrogen oxide. A chemical filter medium (F1) comprises a first ozone absorption layer (L1) including a first filtering base neutral material (M1) for removing ozone; a first nitrogen oxide absorption layer (L2) including a filtering base material (M2) for removing nitrogen oxide formed on (L1); and second ozone absorption layer (L3) containing second filtering base neutral material (M3) for removing ozone formed on (L2); and optionally a tray. Independent claims are also included for: (1) manufacturing of (F1) involving introducing (L1) into the lower case, forming (L2) and (L3), and connecting upper and lower case of the tray so that the upper case covers the lower case; (2) a chemical filter medium; and (3) a chemical filter.