| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a thermal flow rate measuring device in which a sensor element is protected from oil mist generated in a clam state after an engine stops, contaminants, and drops of water which flight in the air. <P>SOLUTION: The thermal flow rate measuring device comprises a side path which takes in a part of fluid flowing in a main path and a sensor element equipped in the side path to detect a flow rate of the fluid wherein the side-path comprises a first side path whose shape is spiral and located on a first virtual plane A of the main path without intersecting, a second side path located on a second virtual plane B which is parallel to the first virtual plane with a certain distance, and a third side path which runs between the first virtual plane A and the second first virtual plane B and connects the first side path and the second side path. <P>COPYRIGHT: (C)2004,JPO&NCIPI</p> |
