| 摘要 |
PROBLEM TO BE SOLVED: To provide a liquid ejecting head which prevents breakage of piezoelectric elements caused by their environment by securely connecting a channel forming substrate to a sealing substrate, and to provide a liquid ejecting head producing method and a liquid ejecting device. SOLUTION: The liquid ejecting head is comprised of the channel forming substrate 10 in which pressure generating chambers 12 communicating with nozzle openings 21 are defined by a plurality of diaphragms 11; the piezoelectric elements 300 arranged on one surface of the channel forming substrate 10 via a diaphragm, for generating change in pressure in the pressure generating chambers 12; and the sealing substrate 30 connected to the surface of the channel forming substrate 12, contacting to the piezoelectric elements 300 side face, for sealing the piezoelectric elements 300. Herein wiring films 60, 90 each made of a noble metal are arranged on the channel forming substrate 10, and a bond reinforcing film 110 made of a material other than a noble metal, is arranged on the wiring films 60, 90 in a contact region between the channel forming substrate 10 and the sealing substrate 30. COPYRIGHT: (C)2004,JPO&NCIPI
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