发明名称 |
PRECISION MASK FOR DEPOSITION AND METHOD FOR MANUFACTURING THE SAME, ELECTROLUMINESCENT DISPLAY AND METHOD FOR MANUFACTURING THE SAME, AND ELECTRONIC EQUIPMENT |
摘要 |
PROBLEM TO BE SOLVED: To provide a precision deposition mask that is easily aligned with a glass substrate in evaporating an emitting layer and the like of an organic EL display, and is strong enough to form an accurate evaporated pattern and to provide a method for easily and accurately manufacturing such a precision deposition mask, an organic EL display and a method for manufacturing the same, and electronic equipment including an organic EL display. SOLUTION: The precision mask has first beams 3 which are arranged parallel at prescribed intervals and form a plurality of first openings 2 and one or a plurality of second beams 5 which are arranged to intersect with the first beams 3 on the first beams 3 and form a plurality of second openings 4, in which the first beams 3 and the second beams 5 are connected by the intersections. COPYRIGHT: (C)2004,JPO&NCIPI |
申请公布号 |
JP2004225071(A) |
申请公布日期 |
2004.08.12 |
申请号 |
JP20030011451 |
申请日期 |
2003.01.20 |
申请人 |
SEIKO EPSON CORP |
发明人 |
YOTSUYA SHINICHI;KUWABARA TAKAYUKI |
分类号 |
H05B33/10;C23C14/04;C23C14/12;C23C14/24;H01L51/50;(IPC1-7):C23C14/04;H05B33/14 |
主分类号 |
H05B33/10 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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