发明名称 SEMICONDUCTOR DEVICE AND MANUFACTURING METHOD FOR THE SEMICONDUCTOR DEVICE
摘要 <P>PROBLEM TO BE SOLVED: To provide a semiconductor device equipped with a resin film on a dicing region, in which a crack is not formed in a protective film, in the case of a dicing cut and which has the high efficiency of a design operation, and to provide a manufacturing method for the semiconductor device. <P>SOLUTION: An A1 wiring 2 and an interlayer insulating film 3 are laminated on a semiconductor substrate 1, and these layers are connected by a via hole 4. A bonding pad 5 and the protective film 6 for protecting the pad 5 are formed on the interlayer insulating film 3 as an uppermost layer. A gold wire 7 is connected to the pad 5 by reverse wire bonding. The resin film 13 is formed on the dicing region 12 so that the gold wire 7 and the end of the semiconductor device are not brought into contact. The resin film 13 is not brought into contact with the protective film 6 but is separated and formed. The semiconductor device has dotted patterns of the resin film 13, arranged on the dicing region 12. <P>COPYRIGHT: (C)2004,JPO&NCIPI
申请公布号 JP2004228479(A) 申请公布日期 2004.08.12
申请号 JP20030017304 申请日期 2003.01.27
申请人 RENESAS TECHNOLOGY CORP 发明人 ITO KOJI
分类号 H01L21/60 主分类号 H01L21/60
代理机构 代理人
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