| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide an XY stage wherein the vibrations after a movable part has transferred at a high speed can be sufficiently suppressed, and the transfer of the movable part can be easily controlled. <P>SOLUTION: An X-axis VCM (voice coil motor) 6 is disposed on a side in the X direction of a movable table 5, a Y-axis VCM 7 is disposed on a side in the Y direction of the movable table 5. The X-axis VCM 6 is provided with a yoke part 6c fixed on a base and having an opening on the movable table 5 side. An X-axis movable piece 6a connected to the side of the movable table 5 and a coil 6b wound around the X-axis movable piece 6a are inserted through the opening. The size of the opening is nearly the same as or more than a movable region in the Y direction of the movable table 5, the movable piece 6a and the coil 6b are freely movable in the Y direction. A Y-axis VCM 7 has a structure similar to the X-axis VCM 6. <P>COPYRIGHT: (C)2004,JPO&NCIPI |
