| 摘要 |
PROBLEM TO BE SOLVED: To provide a beam separator capable of making electron beams go straight by correcting the orbit of the electron beam even if the orbit shifts from an optical axis at the outgoing end of the beam separator. SOLUTION: A orbit shift correcting means 20 compositionally applies an electric field and a magnetic field perpendicularly crossing each other to reflected electron beams which have passed almost straight the beam separator 10. The condition of the orbit shift correcting means 20 is set such that total action to the reflected electron beams of the electric field and the magnetic field of the orbit shift correcting means 20 has the same intensity of the total action to the reflected electron beams of the electric field and the magnetic field of the beam separator 10, but directions of both actions are opposite. COPYRIGHT: (C)2004,JPO&NCIPI
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