| 摘要 |
<P>PROBLEM TO BE SOLVED: To solve the problem that visual inspection has been difficult in the vicinity of the boundaries of images in the case that inspection is visually performed on a large-size substrate and that an image of the substrate is divided. <P>SOLUTION: Two groups of telecentric optical systems combining telecentric lenses 32A and 32B and line sensors 34A and 34B are aligned and arranged in the direction 74 of imaging of the substrate 1. A line 70A read by the line sensor 34A partially overlaps a line 70B read by the line sensor 34B. When image data of the amount of one line is captured in this state, a scanning head including the two groups of telecentric optical systems is sent forward in a driving direction 76 by the amount of one line. By subsequently repeating similar processing, data on two images partially overlapping each other over all the lines of the substrate 1 is acquired. Locational deviations and color deviations in overlapping parts of the two images are corrected to compose a composite image. On the basis of the composite image, the substrate 1 is inspected. <P>COPYRIGHT: (C)2004,JPO&NCIPI |
