发明名称 DEVICE AND ITS MANUFACTURING METHOD, ELECTRO-OPTICAL DEVICE, AND ELECTRONIC APPARATUS
摘要 <P>PROBLEM TO BE SOLVED: To provide a method of manufacturing a device which dispersively arranges elements such as a TFT on a final substrate, thus manufacturing the device efficiently at a low cost, and also to provide the device by the method, an electro-optical device and an electronic apparatus. <P>SOLUTION: In this method, a part of a plurality of elements 12 arranged on a transfer substrate 10 are transferred to a final substrate 14, and the device is manufactured using the transferred elements. The method comprises a first process wherein the plurality of elements 12 are mounted on the transfer substrate 10 via an exfoliation layer 11 so that the terminals of the elements are exposed to an opposite side to the exfoliation layer 11, a second process wherein the face of the terminal side of the elements 12 on the transfer substrate 10 is bonded via an anisotropic conductive adhesive (a conductive adhesive) to the face of the final substrate 14 on which conductive parts are arranged, a third process wherein exfoliation is generated in the exfoliation layer 11 between the transfer substrate 10 and the final substrate 14, and a fourth process wherein the transfer substrate 10 finishing transfer of the elements 12 is separated from the final substrate 14. <P>COPYRIGHT: (C)2004,JPO&NCIPI
申请公布号 JP2004228373(A) 申请公布日期 2004.08.12
申请号 JP20030015097 申请日期 2003.01.23
申请人 SEIKO EPSON CORP 发明人 HASHIMOTO TAKASHI;TAKAKUWA ATSUSHI;KAMAKURA TOMOYUKI;UTSUNOMIYA SUMIO
分类号 G02F1/1368;H01L21/02;H01L21/336;H01L21/77;H01L21/84;H01L27/108;H01L27/12;H01L27/13;H01L29/745;H01L29/786 主分类号 G02F1/1368
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