| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a plasma treatment method in which stable glow discharge plasma is formed in a wide range under pressure near the atmospheric pressure and a treatment object of even a metal member of large area can be treated at the same time for the whole surface, and which has high productivity, and a plasma treatment device. <P>SOLUTION: In the plasma treatment method, a dielectric layer is installed on the surface of a metal substrate 3 having a plurality of through holes 2, and a plurality of metal substrates 3 are overlapped so that the through holes 2 may correspond thereto to form an electrode 4, and it comprises a step of supplying gas of pressure near the atmospheric pressure toward the inside of the through holes 2, a step of impressing a voltage between the metal substrates 3 and making the gas in the through hole 2 into the plasma, and a step of applying surface treatment on the treatment object member M placed opposed to the vicinity of the electrode 4 by utilizing the plasma. <P>COPYRIGHT: (C)2004,JPO&NCIPI |
