| 摘要 |
<P>PROBLEM TO BE SOLVED: To obtain a slope-like cross-sectional shape by simultaneously or successively irradiating an organic film with two different ultraviolet laser beams. <P>SOLUTION: In the laser machining method for an organic film where an organic film 11 consisting of an organic material thin film is subjected to patterning by laser beam irradiation, as the laser beams, two different ultraviolet laser beams 1 and 2 are used, and, the two ultraviolet laser beams 1 and 2 are scanned, and are simultaneously or successively applied to two linear patterns having misregistration Δ between the centers, so that the cross-sectional shape 24 of the organic film 11 machined by the two ultraviolet laser beams 1 and 2 is formed into a slope shape. <P>COPYRIGHT: (C)2004,JPO&NCIPI |
