| 摘要 |
The invention relates to a probe for an optical near field microscope, said probe comprising a planar carrier carrying a probe tip at least partially consisting of a transparent material. The invention also relates to a method for producing one such probe. The aim of the invention is to provide a probe for an optical near field microscope and a method for the production thereof, whereby the probe can be produced with high reproducibility according to a simple technology and can have a simple but efficient light supply. To this end, the carrier of one such probe comprises an optical waveguide, and the inventive method comprises the following steps: a coating comprising an optical waveguide is applied to a substrate in a first step; a transparent layer is applied in a second step, such that the optical waveguide is arranged between the substrate and the transparent layer; the transparent layer is masked in at least one region above the probe tip in a third step; and the transparent layer is etched, forming the probe tip, in a fourth step. |
