| 摘要 |
PROBLEM TO BE SOLVED: To provide a substrate processor capable of satisfactorily performing a substrate processing without corroding a part where a chemical adheres, even when a prescribed substrate processing is performed by the chemical. SOLUTION: A resin part 10a opposed to a treating space 31, an inner periphery 11a of a rotating axis 11, and a lower side treatment liquid nozzle 15 of a spin base 10, are formed of a fluororesin. Consequently, since parts are not corroded even if the chemical adheres to the resin 10a or a gas supply passage 19 when carrying in substrate processing, a substrate processing can be satisfactorily performed . COPYRIGHT: (C)2004,JPO&NCIPI |
