Disclosed is a probe for a coordinate measuring device, comprising a replaceable, miniaturized stylus (108) which is rigid and forms a structural unit (116) along with a membrane-type sensor system (100) that can be deflected in a predetermined manner when a force acts upon the stylus (108). The structural unit (116) is connected in a fixed manner to a probe holder (70) and can be handled together with said probe holder (70) when the stylus (108) is replaced. The sensor system (100) can also be provided with electric sensor elements (114) for detecting the deflection, in which case separate means are provided for mechanically fastening the structural unit (116) on the probe and electrically connecting the sensor elements (114).
申请公布号
WO2004068068(A1)
申请公布日期
2004.08.12
申请号
WO2003EP14584
申请日期
2003.12.19
申请人
CARL ZEISS INDUSTRIELLE MESSTECHNIK GMBH;ROTH, ROLAND;DOMINICUS, WALTER;STRAUSS, WOLFGANG;SEITZ, KARL
发明人
ROTH, ROLAND;DOMINICUS, WALTER;STRAUSS, WOLFGANG;SEITZ, KARL