LOW-TEMPERATURE METAL OXIDE COATING

摘要

A low-temperature fabrication method for fabricating a conformal metal oxide coating on a substrate, the method comprising the steps of. coating a surface of a substrate with a non-hydrolysed precursor solution of one or more moisture-sensitive metal alkoxides in an organic solvent at a temperature of less than 150 °C; and rinsing the precursor solution coated on the surface of the substrate in water at a temperature of less than 150 °C to hydrolyse precursor solution at the surface of the substrate and thereby form a conformal metal oxide coating on the substrate.