发明名称 Verfahren zum Herstellen einer Mikrolinse eines Halbleiterbauteils
摘要 A mask for patterning a microlens includes a glass substrate, a main light-blocking region formed on a predetermined area of the glass substrate, and auxiliary light-blocking regions formed around the main light-blocking region or on a part of the main light-blocking region such that as the intervals between the main and auxiliary light-blocking regions become longer, the intensity of light transmitted thereto becomes greater.
申请公布号 DE19648063(B4) 申请公布日期 2004.08.12
申请号 DE1996148063 申请日期 1996.11.20
申请人 LG SEMICON CO., LTD. 发明人 BAEK, EUY HYEON
分类号 G02B3/00;G03F1/00;G03F1/68;G03F7/20;H01L27/14;H01L27/146;H01L31/02 主分类号 G02B3/00
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